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Very Quick Start™ Introductory
MEMS & MICROSYSTEMS COURSE
4 3/4 Hour Narrated Course
Dr. Ted Dellin
The technology that is used to build microelectronics can also be used to develop micro mechanical structures, sensors and microsystems , commonly referred to as MEMS. There has been a strong, broad based growth in developing MEMs devices This introductory course describes bulk and surface micromachining and microsystems that integrate MEMS and microelectronics. . No prior MEMS knowledge is assumed. The only prerequisite is an introductory college physics course.
The course starts by providing an overview of Silicon processing. It then goes into Bulk MEMS which etches features into the Silicon wafer and uses wafer bonding. Next it considers Surface MEMS which builds up features using alternating layers of sacrificial and mechanical layers. It then goes on to consider monolithic (systems on a chip) and hybrid (e.g., system in in package) integration. It closes with a look at two leading examples of microsystems, the Analogy Device accelerometer chip and the Texas Instruments Digital Mirror Device
The course is designed for technicians, engineers, scientists, managers and technical salespeople. This course is part of an integrated curriculum that also includes Microelectronics, Optoelectronics, IC Reliability, Submicron CMOS, Microbiology and other courses.
The course consists of 8 modules as shown in the outline below.
Module Topics and Narration Time
3. Basic Building Blocks of Silicon Processing 45 minutes
4. Bulk Micromachining 48 minutes
5. Surface Micromachining 44 minutes
6. MEMS Packaging 25 minutes
7. Microsystems 20 Minutes
8. Microsystems Examples (Analog Devices Accelerometer & TI Digital Mirrors) 43 minutes